@conference{aufsatz6131,
    affiliation = {Professur für Halbleitertechnik},
    title = {Atomic Layer Deposition and Subsequent In Situ Annealing of Tantalum Nitride Thin Films},
    journal = {AVS 5th International Conference on Atomic Layer Deposition, San Jose, 8.-10.08.2005},
    year = {2005},
    peerreview = {Nein},
    edition = {Neuerscheinung},
    author = {Hossbach, C. and Albert, M. and Adolphi, B. and Bartha, J. W.}
}