@conference{aufsatz6136,
    affiliation = {Professur für Halbleitertechnik},
    title = {Analytical study of the structuring process for embedded SAW finger electrodes.},
    journal = {13. Tagung Festkörperanalytik, Chemnitz, 26.-29.06.2005},
    year = {2005},
    peerreview = {Nein},
    edition = {Neuerscheinung},
    author = {Reitz, D. and Menzel, S. and Rößler, T. and Albert, M. and Zeidler, D. and Wetzig, K.}
}