@conference{aufsatz6137,
    affiliation = {Professur für Halbleitertechnik},
    title = {PECVD of doped and intrinsic a-Si:H layers for solar cell structures using a novel inline deposition system},
    journal = {IEEE2005, Orlando, 01.-03.01.2005},
    year = {2005},
    peerreview = {Nein},
    edition = {Neuerscheinung},
    author = {Terasa, R. and Kottwitz, A. and Kuske, J. and Stephan, U. and Bartha, J. W.}
}