@article{aufsatz62587,
    affiliation = {Professur für Halbleitertechnik},
    title = {High efficiency high rate microcrystalline silicon thin-film solar cells deposited at plasma excitation frequencies larger than 100 MHz},
    journal = {Sol. Energy Mater. Sol. Cells},
    keywords = {-},
    pages = {347--353},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {143},
    doi = {10.1016/j.solmat.2015.07.014},
    author = {Strobel, C. and Leszczynska, B. and Merkel, U. and Kuske, J. and Fischer, D.D. and Albert, M. and Holovský, J. and Michard, S. and Bartha, J.W.}
}