@article{aufsatz62597,
    affiliation = {Professur für Halbleitertechnik},
    title = {Barrier performance optimization of atomic layer deposited diffusion barriers for organic light emitting diodes using x-ray reflectivity investigations},
    journal = {Appl. Phys. Lett. 103, 233302},
    keywords = {ALD, moisture barriers, OLED, XRR, XPS},
    year = {2013},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Singh, A. and Klumbies, H. and Schröder, U. and Müller-Meskamp, L. and Geidel, M. and Knaut, M. and Hoßbach, C. and Albert, M. and Leo, K. and Mikolajick, T.}
}