@conference{aufsatz62599,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ QCM monitoring of ALD in porous materials},
    journal = {Baltic ALD 2014, Helsinki, Finland},
    keywords = {ALD, QCM, porous materials, in-situ, Al2O3, TiO2, film growth, process integration},
    year = {2014},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Knaut, M. and Dirnstorfer, I. and Albert, M. and Romstedt, D. and Bartha, J.W.}
}