@conference{aufsatz62600,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ QCM monitoring of ALD in porous materials},
    journal = {15th AVS conference on Atomic Layer Deposition, Portland, OR, USA},
    keywords = {ALD, QCM, in-situ, Al2O3, TiO2, porous materials, film growth, process monitoring},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Knaut, M. and Dirnstorfer, I. and Albert, M. and Bartha, J.W.}
}