@conference{aufsatz63157,
    affiliation = {Professur für Halbleitertechnik},
    title = {Atomic Layer Deposition of Al2O3 on NF3-pre-treated graphene},
    journal = {Ion M. Tiginyanu (Hrsg.): Nanotechnology VII : May 4-6, 2015, Barcelona, Spain. Barcelona, 2015 (Proceedings of SPIE, 9519)},
    keywords = {-},
    pages = {951915},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {10.1117/12.2181242 },
    author = {Junige, M. and Oddoy, T. and Yakimova, R. and Darakchieva, V. and Wenger, C. and Lupina, G. and Kitzmann, J. and Albert, M. and Bartha, J.W.}
}