@conference{aufsatz63158,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-vacuo study of functionalization approaches for the ALD of high-k dielectrics on graphene},
    journal = {AVS 15th International Conference on Atomic Layer Deposition : June 28 – July 1, 2015, Portland, Oregon, USA. Portland, 2015 },
    keywords = {-},
    year = {2015},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Junige, M. and Oddoy, T. and Yakimova, R. and Darakchieva, V. and Wenger, C. and Lupina, G. and Albert, M. and Bartha, J.W.}
}