@conference{aufsatz63165,
affiliation = {Professur für Halbleitertechnik},
title = { In-situ real-time Spectroscopic Ellipsometry for the investigation of Atomic Layer Depositions on Graphene.},
journal = { 9th Workshop Ellipsometry : February 23-25, 2015 University of Twente in Enschede, the Netherlands},
keywords = {-},
year = {2015},
peerreview = {Nein},
openaccess = {Nein},
author = {Junige, M. and Oddoy, T. and Geidel, M. and Darakchieva, V. and Yakimova, R. and Wenger, C. and Lupina, G. and Albert, M. and Schubert, M. and Bartha, J.W.}
}