@conference{aufsatz63168,
    affiliation = {Professur für Halbleitertechnik},
    title = { In-situ real-time monitoring and control of kinetic processes in Atomic Layer Depositions by Spectroscopic Ellipsometry with 1.25 Hz sampling rate},
    journal = {2015 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) : April 14-16, 2015 Dresden, Germany. Dresden, 2015 },
    keywords = {-},
    year = {2015},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Junige, M. and Sharma, V. and Tanner, R. and Schmidt, D. and Pribil, G. and Albert, M. and Schubert, M. and Bartha, J.W.}
}