@conference{aufsatz63169,
    affiliation = {Professur für Halbleitertechnik},
    title = { In-situ real-time Spectroscopic Ellipsometry for the monitoring and control of kinetic processes in oxide, nitride, and metal ALD},
    journal = {AVS 15th International Conference on Atomic Layer Deposition : June 28 – July 1, 2015, Portland, Oregon, USA. Portland, 2015},
    keywords = {-},
    year = {2015},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Junige, M. and Sharma, V. and Tanner, R. and Schmidt, D. and Pribil, G. and Albert, M. and Schubert, M. and Bartha, J.W.}
}