@article{aufsatz63170,
    affiliation = {Professur für Halbleitertechnik},
    title = {Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films},
    journal = {ECS Journal of Solid State Science and Technology},
    keywords = {-},
    pages = {277--287},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Ja},
    volume = {4},
    number = {7},
    doi = {10.1149/2.0301507jss},
    author = {Henke, T. and Knaut, M. and Hoßbach, C. and Geidel, M. and Rebohle, L. and Albert, M. and Skorupa, W. and Bartha, J.W.}
}