@conference{aufsatz65672,
    affiliation = {Professur für Halbleitertechnik},
    title = {Temperature distribution during flash lamp annealing of thin film multilayer systems},
    journal = {E-MRS 2015 Fall Meeting, 15-18 September 2015, Warsaw, Poland, 2015},
    keywords = {-},
    year = {2015},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Rebohle, L. and Schumann, T. and Prucnal, S. and Skorupa, W. and Henke, T.}
}