@article{aufsatz65673,
affiliation = {Professur für Halbleitertechnik},
title = {Low-thermal budget flash light annealing for Al2O3 surface passivation},
journal = {Physica Status Solidi (RRL) – Rapid Research Letters},
keywords = {Al2O3, surface passivation, flash light annealing, atomic layer deposition, carrier lifetimes},
pages = {631--635},
year = {2015},
peerreview = {Ja},
openaccess = {Nein},
volume = {9},
number = {11},
doi = {DOI: 10.1002/pssr.201510306},
author = {Simon, D. K. and Henke, T. and Jordan, P. M. and Fengler, F. P. G. and Mikolajick, T. and Bartha, J.W. and Dirnstorfer, I.}
}