@article{aufsatz68464,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Electrically tunable, optical microcavity based on metallized and ultra-soft PDMS gel },
    journal = {Proc. SPIE 9798, Electroactive Polymer Actuators and Devices (EAPAD) 979832},
    keywords = {(Electrically tunable) microcavity, dielectric elastomer actuator, oxygen plasma treatment, polymer surface metallization, PDMS gel},
    year = {2016},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {doi: 10.1117/12.2219197},
    author = {Franke, M. and Slowik, I. and Paschew, G. and Merkel, U. and Fröb, H. and Leo, K. and Richter, A.}
}