@article{aufsatz68470,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves},
    journal = {Micromachines 2015, 6(11)},
    keywords = {soft lithography; dry film resist; microfluidics},
    pages = {1588--1596},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {doi:10.3390/mi6111442},
    author = {Frank, P. and Häfner, S. and Paschew, G. and Richter, A.}
}