@article{aufsatz68472,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Optoelectrothermic Control of Highly Integrated Polymer-Based MEMS Applied in an Artificial Skin},
    journal = {Adv. Mater. 2009 , 21},
    keywords = {-},
    pages = {979--983},
    year = {2009},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {DOI: 10.1002/adma.200802737},
    author = {Richter, A. and Paschew, G.}
}