@conference{aufsatz69167,
    affiliation = {Professur für Halbleitertechnik},
    title = {Quartz crystal microbalance sensors for atomic layer deposition process and equipment control},
    journal = {16th European Advanced Process Control and Manufacturing Conference (apc|m), Reutlingen, Germany},
    keywords = {ALD, QCM, in-situ, Al2O3, TiO2, HfO2, film growth, process monitoring, process development},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Knaut, M. and Albert, M. and Bartha, J.W.}
}