@conference{aufsatz69168,
    affiliation = {Professur für Halbleitertechnik},
    title = {Atomic layer deposition and 3D nanoscale substrates - nanowires, nanotubes and nanopores},
    journal = {16th AVS conference on Atomic Layer Deposition, Dublin, Ireland},
    keywords = {ALD, QCM, in-situ, TiO2, porous materials, nanowires, nanotubes, film growth, process monitoring},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Knaut, M. and Macak, J. and Strehle, S. and Albert, M. and Bartha, J.W.}
}