@conference{aufsatz69169,
    affiliation = {Professur für Halbleitertechnik},
    title = {High-aspect ratio anodic TiO2 nanotubes: unprecedented ability of ALD to add a functionality},
    journal = {16th AVS conference on Atomic Layer Deposition, Dublin, Ireland},
    keywords = {ALD, Al2O3, porous materials, nanotubes, film growth, high aspect ratio},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Prikryl, J. and Zazpe, R. and Knaut, M. and Sopha, H. and Bartha, J.W. and Macak, J.}
}