@conference{aufsatz69171,
    affiliation = {Professur für Halbleitertechnik},
    title = {Comparison of MLD-processes with aromatic and linear organic precursor investigated by in situ QCM and in vacuo XPS},
    journal = {16th AVS conference on Atomic Layer Deposition, Dublin, Ireland},
    keywords = {MLD, QCM, XPS, in-situ, film growth},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Fischer, D. and Knaut, M. and Albert, M. and Bartha, J.W.}
}