@conference{aufsatz69180,
    affiliation = {Professur für Halbleitertechnik},
    title = {Deposition of Amorphous and Microcrystalline Silicon in Very High Frequency Range Up to 140 Mhz},
    journal = {32nd European Photovoltaic Solar Energy Conference and Exhibition (2016)},
    keywords = {PECVD, Solar Cell, Microcrystalline Silicon, Very High Frequency, Amorphous Silicon },
    pages = {1272--1275},
    isbn = {3-936338-41-8},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    doi = {10.4229/EUPVSEC20162016-3DV.1.19},
    author = {Leszczynska, B. and Strobel, C. and Leszczynski, S. and Fischer, D.D. and Albert, M. and Bartha, J.W. and Stephan, U. and Kuske, J.}
}