@article{aufsatz71514,
    affiliation = {Professur für Halbleitertechnik},
    title = {Temperature dependence of the sticking coefficients of bis-diethyl aminosilane and trimethylaluminum in atomic layer deposition},
    journal = {J. Vac. Sci. Technol. A 35 , 01B119},
    keywords = {-},
    year = {2017},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {10.1116/1.4971197},
    author = {Schwille, C. and Schössler, T. and Schön, F. and Oettel, M. and Bartha, J.W.}
}