@conference{aufsatz71517,
    affiliation = {Professur für Halbleitertechnik},
    title = {The ALD of Ru and RuO2 – An intertwined special case},
    journal = { AVS 16th International Conference on Atomic Layer Deposition : 24th – 27th July 2016, Dublin, Ireland. Dublin, 2016 },
    keywords = {-},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Junige, M. and Killge, S. and Reif, J. and Geidel, M. and Albert, M. and Bartha, J.W.}
}