@conference{aufsatz71523,
    affiliation = {Professur für Halbleitertechnik},
    title = {Chemical path to Atomic Layer Etching},
    journal = {Novel high-k application workshop 2016. Dresden},
    keywords = {-},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Junige, M. and Sundqvist, J.}
}