BibTex - Publikationen
@conference{aufsatz71536,
    affiliation = {Professur für Halbleitertechnik},
    title = {3D integration: ALD Ruthenium layers grown on metallic and oxide interfaces for TSV with high aspect ratios – Why blisters? },
    journal = {MAM 2016 – Materials for advanced metalization : 20th – 23th March 2016, Brussels, Belgium. Brussels, 2016},
    keywords = {-},
    year = {2016},
    peerreview = {Nein},
    openaccess = {Nein},
    author = {Killge, S. and Junige, M. and Geidel, M. and Neumann, V. and Wenzel, C. and Knaut, M. and Albert, M. and Bartha, J.W.}
}