@conference{aufsatz71543,
    affiliation = {Professur für Halbleitertechnik},
    title = {Modeling and characterization of optical TSVs },
    journal = {SPIE 10325, Optical Fibers and Their Applications 2017, 103250O, Optical Fibers and Their Applications 2017, Supraśl, Poland, Poland | January 23, 2017},
    keywords = {-},
    year = {2017},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {10.1117/12.2270994},
    author = {Neumann, N. and Charania, S. and Killge, S. and al-Husseini, Z. and Henker, R. and Ellinger, F. and Bartha, J.W. and Plettemeier, D.}
}