@article{aufsatz71544,
    affiliation = {Professur für Halbleitertechnik},
    title = {Simulation approach of Atomic Layer Deposition in large 3D structures},
    journal = {Modelling and Simulation in Materials Science and Engineering},
    keywords = {-},
    year = {2017},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {10.1088/1361-651X/aa5f9d},
    author = {Schwille, M. and Barth, J. and Schössler, T. and Schön, F. and Bartha, J.W. and Oettel, M.}
}