@conference{aufsatz71554,
    affiliation = {Professur für Halbleitertechnik},
    title = {Towards the realization of optical interconnets on Si interposer},
    journal = { Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2016 IEEE International, 23-26 May 2016 },
    keywords = {Optical interconnects, TSV-Waveguide, Waveguide by imprint lithography },
    isbn = {978-1-5090-0386-0 },
    issn = {23806338 },
    year = {2016},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Killge, S. and Charania, S. and Richter, K. and Bartha, J.W.}
}