@conference{aufsatz71558,
    affiliation = {Professur für Halbleitertechnik},
    title = {Development of ultra high speed on-chip Optical Interconnects by state of the art Si etching process and Nano Imprint Lithography},
    journal = {Conference: semicon 2015 - Advanced Packaging Conference (APC)},
    keywords = {-},
    year = {2015},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Charania, S. and Killge, S. and Bartha, J.W.}
}