@article{aufsatz74463,
    affiliation = {Professur für Halbleitertechnik},
    title = {Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO2 substratum},
    journal = {Nanotechnology 28 (2017), Nr. 39},
    keywords = {-},
    pages = {395301},
    year = {2017},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {https://doi.org/10.1088/1361-6528/aa8844},
    edition = {keiner},
    author = {Junige, M. and Löffler, M. and Geidel, M. and Albert, M. and Bartha, J.W. and Zschech, E. and Rellinghaus, B. and van Dorp, W.F.}
}