@conference{aufsatz74465,
    affiliation = {Professur für Halbleitertechnik},
    title = {In-situ real-time and in-vacuo study of the temperature impact on the Al2O3 ALD nucleation upon pristine monolayer graphene},
    journal = {AVS 17th International Conference on Atomic Layer Deposition : July 15 – 18, 2017, Denver, Colorado, USA. Denver, 2017},
    keywords = {-},
    year = {2017},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Junige, M. and Kitzmann, J. and Chavarin, C.A. and Geidel, M. and Reif, J. and Albert, M. and Lupina, G. and Wenger, C. and Bartha, J.W.}
}