@conference{aufsatz74468,
    affiliation = {Professur für Halbleitertechnik},
    title = {CVD-literature overview of metal-organic and organometallic precursors as inspiration for the Atomic Layer Deposition of Gold},
    journal = {Joint EuroCVD 21 – Baltic ALD 15 Conference : 11th to 14th of June 2017 in Linköping, Sweden. Linköping, 2017},
    keywords = {-},
    year = {2017},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {Poster},
    author = {Junige, M. and Schulz, S. and Albert, M. and Weigang, J.J. and Bartha, J.W. and Barry, S.T.}
}