@conference{aufsatz74469,
    affiliation = {Professur für Halbleitertechnik},
    title = {HERALD – Early Career Investigators : In-situ real-time Spectroscopic Ellipsometry for the investigation of Atomic Layer Processing},
    journal = { Joint EuroCVD 21 – Baltic ALD 15 Conference : 11th to 14th of June 2017 in Linköping, Sweden. Linköping, 2017},
    keywords = {-},
    year = {2017},
    peerreview = {Ja},
    openaccess = {Nein},
    volume = {Poster},
    author = {Junige, M.}
}