@conference{aufsatz75101,
affiliation = {Professur für Halbleitertechnik},
title = {, Amorphous Silicon Deposited with Plasma Excitation Frequencies Larger Than 100 MHz for Heterojunction Solar Cells},
journal = {33rd European Photovoltaic Solar Energy Conference and Exhibition, Amsterdam (2017)},
keywords = {PECVD, Heterojunction Solar Cells, Very High Frequency, Amorphous Silicon },
pages = {745--748},
isbn = {3-936338-47-7},
year = {2017},
peerreview = {Ja},
openaccess = {Nein},
doi = {10.4229/EUPVSEC20172017-2AV.3.15},
author = {Strobel, C. and Leszczynska, B. and Leszczynski, S. and Albert, M. and Stahr, F. and Kuske, J. and Bartha, J.W.}
}