@conference{aufsatz80676,
affiliation = {Professur für Mikrosystemtechnik},
title = {X-ray characterization of dielectric layers of crosslinked methacrylate copolymers for application in organic electronics},
journal = {Proc. 16th Europ. Powder Diffraction Conf., Edinburgh, 2018 },
keywords = {dielectric layers, PMMA copolymer, multilayer chracterization},
pages = {159},
year = {2018},
peerreview = {Ja},
openaccess = {Nein},
author = {Jehnichen, D and Pospiech, D. and Berndt, A. and Gomoll, S.C. and Natkowski, E. and Plötner, M.}
}