BibTex - Publikationen
@article{aufsatz80880,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Characterization of self-assembled monolayers for CueCu bonding technology},
    journal = {Microelectronic Engineering 202 },
    keywords = {Self-assembled monolayer, XPS, Infrared spectroscopic ellipsometry, IRSE, Cu-Cu bonding, Cu passivation},
    pages = {19--24},
    location = {www.elsevier.com/locate/mee},
    year = {2018},
    peerreview = {Ja},
    openaccess = {Nein},
    doi = {Xhttps:// doi.org/10.1016/j.mee.2018.09.008},
    edition = {keiner},
    author = {Lykova, M. and Langer, E. and Hinrichs, K. and Panschenko, I. and Meyer, J. and Künzelmann, U. and Wolf, M.J. and Lang, K.D.}
}