@article{aufsatz81916,
    affiliation = {Professur für Optoelektronik},
    title = {INTEGRATED PROCESSING OF STACKED-GATE HETEROSTRUCTURES - PLASMA-ASSISTED LOW-TEMPERATURE PROCESSING COMBINED WITH RAPID THERMAL HIGH-TEMPERATURE PROCESSING},
    journal = {MICROELECTRONIC ENGINEERING},
    pages = {209--214},
    issn = {0167-9317},
    year = {1994},
    peerreview = {Nein},
    volume = {25},
    number = {2-4},
    doi = {doi:10.1016/0167-9317(94)90017-5},
    author = {MISRA, V and HATTANGADY, S and XU, XL and WATKINS, MJ and HORNUNG, B and LUCOVSKY, G and WORTMAN, JJ and EMMERICHS, U and MEYER, C and LEO, K and KURZ, H}
}