@article{aufsatz81933,
affiliation = {Professur für Optoelektronik},
title = {2ND-HARMONIC GENERATION IN SI-SIO2 HETEROSTRUCTURES FORMED BY CHEMICAL, THERMAL, AND PLASMA-ASSISTED OXIDATION AND DEPOSITION PROCESSES},
journal = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A-VACUUM SURFACES AND FILMS},
pages = {964--970},
issn = {0734-2101},
year = {1993},
peerreview = {Nein},
volume = {11},
number = {4, 1},
doi = {doi:10.1116/1.578576},
author = {BJORKMAN, CH and SHEARON, CE and MA, Y and YASUDA, T and LUCOVSKY, G and EMMERICHS, U and MEYER, C and LEO, K and KURZ, H}
}