@article{aufsatz81987,
    affiliation = {Professur für Optoelektronik},
    title = {TITANIUM GETTERING IN SILICON - INVESTIGATION BY DEEP LEVEL TRANSIENT SPECTROSCOPY AND SECONDARY ION MASS-SPECTROSCOPY},
    journal = {JOURNAL OF APPLIED PHYSICS},
    pages = {3472--3474},
    issn = {0021-8979},
    year = {1987},
    peerreview = {Nein},
    volume = {62},
    number = {8},
    doi = {doi:10.1063/1.339292},
    author = {LEO, K and SCHINDLER, R and KNOBLOCH, J and VOSS, B}
}