@conference{aufsatz84100,
    affiliation = {Professur für Halbleitertechnik},
    title = {In situ investigations on the crystal structure dependent ALD film growth of TiO2},
    journal = {18th AVS conference on Atomic Layer Deposition, Incheon, South Korea},
    keywords = {ALD, QCM, in-situ, TiO2, crystallization, film growth, process monitoring},
    year = {2018},
    peerreview = {Ja},
    openaccess = {Nein},
    author = {Knaut, M. and Albert, M. and Bartha, J.W.}
}