@conference{aufsatz84466,
    affiliation = {Professur für Technische Logistik},
    title = {Automatic Fault Detection in Rails of Overhead Transport Systems for Semiconductor Fabs},
    journal = {30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)},
    keywords = {Rails Artificial neural networks Sensors Fault detection Network topology Neurons Training fault detection OHT AMHS condition monitoring artificial neural network},
    pages = {1--6},
    location = {Saratoga Springs, NY, USA},
    issn = {2376-6697},
    year = {2019},
    peerreview = {Ja},
    openaccess = {Ja},
    doi = {10.1109/ASMC.2019.8791756},
    author = {Zhakov, Artem and Zhu, Hailong and Siegel, Armin and Rank, Sebastian and Schmidt, Thorsten and Fienhold, Lars and Hummel, Stephan}
}