@book{buch1855,
    affiliation = {Professur für Halbleitertechnik},
    title = {Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics},
    keywords = {-},
    year = {2010},
    publisher = {Materials Research Sciety, Symposium Proceedings Volume 1249},
    isbn = {978-1-60511-226-8},
    author = {Bartha, J.W. and Borst, C. L. and DeNardis, D. and Papa Rao , S. S. and Kim, H. and Naeemi, A. and Nelson, A. and Wook Ro, H. and Toma, D.}
}