@book{buch2488,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Bio and Nano Packaging Techniques for Electron Devices },
    keywords = {-},
    year = {2012},
    publisher = {Springer-Verlag Berlin Heidelberg, 2012, 491-514},
    isbn = {978-3-642-28521-9},
    author = {J., Uhlemann and R., Kirchner and K.-J., Wolter and G., Gerlach}
}