@book{buch2509,
    affiliation = {Professur für Mikrosystemtechnik},
    title = {Bio and Nano Packaging Techniques for Electron Devices},
    keywords = {-},
    year = {2012},
    publisher = {Springer-Verlag Berlin Heidelberg, 2012, 557-579},
    isbn = {978-3-642-28521-9},
    author = {T., Schuster and R., Landgraf and A., Finn and M., Mertig}
}